MICROMACHINED DEVICES AND COMPONENTS III
|
1997年
/
3224卷
关键词:
fluidic microcomponents;
micromachining of plastics;
D O I:
10.1117/12.284516
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
This paper describes the fabrication and testing of plastic fluidic connectors suitable for the assembly of multichip microfluidic systems. The connectors basically consist of a series of 50-200 x 20 mu m(2) capillaries embedded in a 70 mu m-thick flexible polyimide substrate with large access holes on both ends. The capillary walls and the connector exterior are coated with a thin layer of p-xylylene providing a high degree of chemical inertness and biocompatibility. These flexible connectors are inherently planar for ease of connection to flat substrates and are constructed using conventional batch lithographic techniques. The connector flow characteristics were tested in nitrogen gas and water. Multiple channel connectors with 3 and 5 capillaries 1.3-4.0 cm-long were constructed successfully.