Transparent oxide semiconductors based on TiO2 doped with V, Co and Pd elements

被引：26

作者：

Domaradzki, Jaroslaw ^{[1
]}

Borkowska, Agnieszka ^{[1
]}

Kaczmarek, Danuta ^{[1
]}

Prociow, Eugeniusz ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2006年 / 352卷 / 23-25期

关键词：

conductivity; sputtering;

D O I：

10.1016/j.jnoncrysol.2006.03.013

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 [材料科学与工程]; 080502 [材料学];

摘要：

In this work, investigations of electrical and optical properties of as-deposited thin films of TiO2 doped with Pd, Co and V elements prepared by the low-pressure hot-target reactive magnetron sputtering have been outlined. Results allowed to find out how selected properties of TiO2 had changed from oxide non-conductor to oxide-semiconductor with desired p- or n-type electrical conduction due to the incorporation of the metal components, mentioned above. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：2324 / 2327

页数：4

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