Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

被引：4

作者：

Enami, Y ^{[1
]}

Jen, AKY ^{[1
]}

Meredith, G ^{[1
]}

Peyghambarian, N ^{[1
]}

机构：

[1] Kyoto Univ, Int Innovat Ctr, Sakyo Ku, Kyoto 6068501, Japan

来源：

ORGANIC PHOTONIC MATERIALS AND DEVICES VI | 2004年 / 5351卷

关键词：

electro-optic polymer; sol-gel waveguide; fiber-coupling loss; wet etching; hybrid modulators;

D O I：

10.1117/12.527613

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-mum-thick EO polymer overlayer, which reduces a half wave voltage (V-pi) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V-pi by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V-pi of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V-pi further.

引用

页码：28 / 35

页数：8

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