Measurement of residual wedge angle with a reversal shear interferometer

被引:14
作者
Chatterjee, Sanjib [1 ]
Kumar, Y. Pawan [1 ]
机构
[1] Govt India, Ctr Adv Technol, Dept Atom Energy, Indore 452013, India
关键词
parallel plate; wedge angle; reversal shear interferometer;
D O I
10.1016/j.optlastec.2005.08.010
中图分类号
O43 [光学];
学科分类号
070207 [光学]; 0803 [光学工程];
摘要
A technique for determination of residual wedge angle of high optical quality transparent parallel plate using a reversal shear interferometer-based optical system has been discussed. In this technique the parallel plate to be tested is used to introduce angular tilt in the preset two-beam interference fringes of a reversal shear interferometer. The parallelism is calculated from the angular tilt of the fringes. The technique is more sensitive compared to techniques using Fizeau interferometer and is most suitable for highly parallel transparent plate with very low residual wedge angle. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:662 / 668
页数:7
相关论文
共 12 条
[1]
AN INTERFERENCE METHOD FOR DETERMINING DEGREE OF PARALLELISM OF (LADER) SURFACES [J].
BERGMAN, TG ;
THOMPSON, JL .
APPLIED OPTICS, 1968, 7 (05) :923-&
[2]
Simple technique for measurement of residual wedge angle of high optical quality transparent parallel plate [J].
Chatterjee, S .
OPTICAL ENGINEERING, 2003, 42 (11) :3235-3238
[3]
On use of ghost-less beam splitter in reversal shear interferometer for measurement of spatial coherence of large cross-section laser beam [J].
Chatterjee, S ;
Prakash, O .
OPTICS AND LASER TECHNOLOGY, 2003, 35 (02) :133-136
[4]
Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer [J].
Hibino, K ;
Oreb, BF ;
Fairman, PS ;
Burke, J .
APPLIED OPTICS, 2004, 43 (06) :1241-1249
[5]
Karow H. H., 1993, FABRICATION METHODS, P704
[7]
MURTY MVR, 1978, OPTICAL SHOP TESTING, P22
[8]
MEASUREMENT OF SPATIAL COHERENCE OF A COPPER VAPOR LASER-BEAM USING A REVERSAL SHEAR INTERFEROMETER [J].
OMATSU, T ;
KURODA, K ;
SHIMURA, T ;
CHIHARA, K ;
ITOH, M ;
OGURA, I .
OPTICAL AND QUANTUM ELECTRONICS, 1991, 23 (04) :S477-S484
[9]
SMITH WJ, 1991, MODERN OPTICAL ENG, P89
[10]
Joint interferometric measurement of planarity and parallelism [J].
Vannoni, M ;
Molesini, G .
OPTICAL ENGINEERING, 2004, 43 (05) :1215-1220