A digital piezoelectric accelerometer with sigma-delta servo technique

被引：22

作者：

Spineanu, A ^{[1
]}

Benabes, P ^{[1
]}

Kielbasa, R ^{[1
]}

机构：

[1] ECOLE SUPER ELECT, SERV MESURES, SUPELEC, F-91192 GIF SUR YVETTE, FRANCE

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 60卷 / 1-3期

关键词：

digital accelerometers; piezoelectricity; sigma-delta servo electronics;

D O I：

10.1016/S0924-4247(97)01386-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design and performance of a direct digital accelerometer using oversampling sigma-delta servo electronics. The measuring system, also called an 'electromechanical sigma-delta modulator', is based on a piezoelectric measuring cell integrated inside the first stage of a second-order sigma-delta modulator. The piezoelectric measuring cell has a new structure in order to realize the acceleration sensing and the servo-loop summer. The active material used is an inexpensive and versatile piezoelectric polymer, polyvinylidene fluoride (PVDF). The accelerometer aims at a working range of +/- 1g and eight-bit resolution. It is suited for vibration measurement.

引用

页码：127 / 133

页数：7

共 15 条

[1] DESIGN METHODOLOGY FOR SIGMA-DELTA-M [J].

AGRAWAL, BP ;

SHENOI, K .

IEEE TRANSACTIONS ON COMMUNICATIONS, 1983, 31 (03) :360-370

[2]

ASCH G, 1991, CAPTEURS INSTRUMENTA, P499

[3]

Berlincourt D., 1964, PHYS ACOUST A, P169

[4] A USE OF DOUBLE INTEGRATION IN SIGMA DELTA MODULATION [J].

CANDY, JC .

IEEE TRANSACTIONS ON COMMUNICATIONS, 1985, 33 (03) :249-258

[5]

de Coulon Y., 1993, 7 INT C SOL STAT SEN, P832

[6]

EYNDE FO, 1993, ANALOG INTERFACES DI, P151

[7]

Franklin G. F., 1980, Digital Control of Dynamic Systems, V1st

[8] DEVELOPMENTS IN INTEGRATED SMART SENSORS [J].

HUIJSING, JH ;

RIEDJIJK, FR ;

VANDERHORN, G .

SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :276-288

[9]

LEME CA, 1992, P IEEE INT S CIRC SY, P1828

[10]

Lewis C. P., 1994, IEE Colloquium on `Oversampling Techniques and Sigma-Delta Modulation' (Digest No.1994/083), P101

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