Sub-micron coatings with low friction and wear for micro actuators

被引：8

作者：

Bandorf, R ^{[1
]}

Lüthje, H ^{[1
]}

Schiffmann, K ^{[1
]}

Staedler, T ^{[1
]}

Wortmann, A ^{[1
]}

机构：

[1] Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany

来源：

MICROSYSTEM TECHNOLOGIES | 2002年 / 8卷 / 01期

关键词：

D O I：

10.1007/s00542-001-0155-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper deals with the fabrication and characterisation of friction and wear reduced nano-films for micro actuator applications. For this investigation films of diamond-like-carbon (DLC), metal doped Me-DLC, carbon-nitride CNx, boron-nitride BN and alumina Al2O3 films have been applied in the thickness range of 20-500 nm. The hardness of those coatings varied between 10 and 60 GPa. Micromechanical and microtribological properties of nano-coatings have been characterized by a modified scanning probe microscope. Besides this a novel micro tester for abrasive wear measurement of nano coatings was used. Friction of micro-contact areas was measured by use of a pin-on-disc tester. It turned out, that friction was - besides other parameters - dependent on determination method and load. Friction determined at areal DLC/DLC contact zones was generally much higher (mu(DLC) 0.1) than diamond tip versus DLC (similar to mu(DLC) 0.06).

引用

页码：51 / 54

页数：4

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