Lithographically induced self-assembly of periodic polymer micropillar arrays

被引:242
作者
Chou, SY [1 ]
Zhuang, L [1 ]
机构
[1] Princeton Univ, Dept Elect Engn, NanoStruct Lab, Princeton, NJ 08544 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 06期
关键词
D O I
10.1116/1.590979
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We observed, and believe it to be the first time, the self-formation of periodic, supramolecular (micrometer scale) pillar arrays in a thin, single-homopolymer film melt, which was originally flat on a plate. The self-formation was induced by placing a second plate (called a mask) a distance above the polymer film. The pillars, formed by rising against the gravitational force and surface tension, bridge the two plates. The pillar height is equal to the plate-mask separation, which is two to seven times the film's initial thickness. If the surface of the mask has a protruding pattern (e.g., a triangle or rectangle), the pillar array can be formed only under the protruding pattern with the edge of the array aligned to the boundary of the mask pattern. We also discuss a model and novel applications of lithographically induced self-assembly. (C) 1999 American Vacuum Society. [S0734-211X(99)15206-5].
引用
收藏
页码:3197 / 3202
页数:6
相关论文
共 12 条
  • [1] BLOCK COPOLYMER THERMODYNAMICS - THEORY AND EXPERIMENT
    BATES, FS
    FREDRICKSON, GH
    [J]. ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1990, 41 (01) : 525 - 557
  • [2] Benard H., 1900, REV GEN SCI PURES AP, V11, P1261, DOI DOI 10.1051/JPHYSTAP:019000090051300
  • [3] Surface-induced structure formation of polymer blends on patterned substrates
    Böltau, M
    Walheim, S
    Mlynek, J
    Krausch, G
    Steiner, U
    [J]. NATURE, 1998, 391 (6670) : 877 - 879
  • [4] CHOU ST, UNPUB
  • [5] Lithographically induced self-construction of polymer microstructures for resistless patterning
    Chou, SY
    Zhuang, L
    Guo, LJ
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (07) : 1004 - 1006
  • [6] Imprint lithography with 25-nanometer resolution
    Chou, SY
    Krauss, PR
    Renstrom, PJ
    [J]. SCIENCE, 1996, 272 (5258) : 85 - 87
  • [7] CHOU SY, 1999, M AM PHYS SOC MARCH
  • [8] CHOU SY, 1997, UNPUB
  • [9] Gunton J.D., 1983, Phase Transitions and Critical Phenomena, V8, P267
  • [10] KRAUSCH G, 1995, MAT SCI ENG R, V14, P1