Magnetic properties of an SmCo/NiFe system for magnetic microactuators

被引：17

作者：

Budde, T ^{[1
]}

Gatzen, HH ^{[1
]}

机构：

[1] Univ Hannover, Inst Microtechnol, D-30167 Hannover, Germany

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2004年 / 272卷

关键词：

microactuator; permanent magnet; SmCo; magnetic annealing;

D O I：

10.1016/j.jmmm.2003.12.805

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

For investigating the process compatibility of sputter-deposited SmCo and electroplated NiFe the system Cr/SmCo/Cr/NiFe/Cr/substrate was investigated. Magnetic properties achieved for SmCo in either sandwich for in-plane measurements are a coercivity of 800 kA/m, a remanence of 0.5 T as well as a maximal energy product of 20 kJ/m(3). It could also be observed, that the permeability of the NiFe improved due to the SmCo annealing process. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：2027 / 2028

页数：2