共 4 条
[1]
Lithography with 157 nm lasers
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1997, 15 (06)
:2112-2116
[2]
BLOOMSTEIN TM, P SEMI TECHN S 98, P101
[3]
The new silica glass for 157 nm lithography
[J].
EMERGING LITHOGRAPHIC TECHNOLOGIES III, PTS 1 AND 2,
1999, 3676
:827-833
[4]
MATSUMOTO K, P SPIE, V3482, P362