An integrated MEMS three-dimensional tactile sensor with large force range

被引：117

作者：

Mei, T

Li, WJ ^{[1
]}

Ge, Y

Chen, Y

Ni, L

Chan, MH

机构：

[1] Chinese Univ Hong Kong, Dept Mech & Automat Engn, Adv Microsyst Lab, Shatin, Hong Kong, Peoples R China

[2] Chinese Acad Sci, Inst Intelligent Machines, State Key Lab Transducer Technol, Hefei 230031, Anhui, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 80卷 / 02期

关键词：

tactile sensing; tactile imaging; MEMS sensors; robotic sensing; MEMS and CMOS integration;

D O I：

10.1016/S0924-4247(99)00261-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An integrated three-dimensional tactile sensor with robust MEMS structure and soft contact surface suitable for robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and +/-10 N in the x and y horizontal directions. The tactile sensor includes 4 X 8 sensing cells each exhibiting an independent, linear response to the three components of forces applied on the cells. By finite element analysis, optimal cell structures and piezoresistor positions were determined. Post bulk-micromachining was performed on foundry-fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable three-dimensional force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper. (C) 2000 Published by Elsevier Science S.A. All rights reserved.

引用

页码：155 / 162

页数：8

共 7 条

[1]

Choi KK, 1998, IEEE INT CONF ROBOT, P2268, DOI 10.1109/ROBOT.1998.680661

[2] Silicon three-axial tactile sensor [J].

Chu, Z ;

Sarro, PM ;

Middelhoek, S .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) :505-510

[3]

Gray BL, 1996, IEEE INT CONF ROBOT, P1, DOI 10.1109/ROBOT.1996.503564

[4] CMOS-compatible traction stress sensor for use in high-resolution tactile imaging [J].

Kane, BJ ;

Cutkosky, MR ;

Kovacs, GTA .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) :511-516

[5]

MEI T, 1998, 2 INT WORKSH MICR RO, P222

[6]

OHKA M, 1995, IEEE INT CONF ROBOT, P817, DOI 10.1109/ROBOT.1995.525384

[7]

Wertz J.R., 1996, Reducing Space Mission Cost

← 1 →