Platinum doped titania film oxygen sensor integrated with temperature compensating thermistor

A TiO2:Pt cermet film oxygen sensor for detecting excess air ratio lambda was prepared by tripole magnetron sputtering system. Fast response and high sensitivity were observed in the neighborhood of a stoichiometric point mainly due to the dispersion of catalytically active platinium in atomic order. The a.c measurement shows that the influence of the electrode contact is the origin of asymmetry in the Cole-Cole plot in low frequency range. The TiO2:Pt film sensor integrated in series with ZnCr2O4 or TiO2:V2O5 film thermistor yields a stable output regardless of temperature fluctuation in the temperature range of interest. (C) 1997 Elsevier Science S.A.