Generation of large-diameter diffractive elements with laser pattern generation

被引：25

作者：

Bowen, JP ^{[1
]}

Michaels, RL ^{[1
]}

Blough, CG ^{[1
]}

机构：

[1] ROCHESTER PHOTON CORP,ROCHESTER,NY 14623

来源：

APPLIED OPTICS | 1997年 / 36卷 / 34期

关键词：

diffractive optics; binary optics; laser pattern generation; rotational pattern generator; null optics;

D O I：

10.1364/AO.36.008970

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe the design and construction of a high-precision laser writing machine for the direct generation of large-diameter rotationally symmetric diffractive optics with continuous profiles in photoresist. The photoresist profile can be used as a replication master surface or etched into a silica substrate. Machine design methodology, as well as qualification of performance, is provided. Test results for an f/2 100-mm clear-aperture diffractive lens directly etched into a silica substrate are presented. Diffraction efficiency as a function of zone spacing and wave-front performance are given. (C) 1997 Optical Society of America.

引用

页码：8970 / 8975

页数：6

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