Surface profile measurement of specular objects by grating projection method

被引：4

作者：

Yamamoto, M ^{[1
]}

Tonooka, M ^{[1
]}

Yoshizawa, T ^{[1
]}

机构：

[1] Tokyo A&T Univ, Dept Mech Syst Eng, Tokyo, Japan

来源：

MACHINE VISION AND THREE-DIMENSIONAL IMAGING SYSTEMS FOR INSPECTION AND METROLOGY II | 2002年 / 4567卷

关键词：

surface shape measurement; grating projection method; phase shifting technique; specular objects; wafer measurement; glass plate measurement;

D O I：

10.1117/12.455240

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This paper proposes a grating projection method to measure three-dimensional profile of specular objects. This method is principally available for any reflective objects without limitation of sizes. A "deformed grating pattern" is observed when the reference gating is projected onto a mirror-like surface of object. This deformed pattern reflected from the surface is captured with a CCD camera and analyzed to get three-dimensional profile of the specimen. Experimental results are shown with different samples.

引用

页码：48 / 55

页数：8

共 9 条

[1] Flatness measurement by UV moire technique [J].

Fujiwara, H ;

Kodera, Y ;

Otani, Y ;

Yoshizawa, T .

LASER INTERFEROMETRY IX: TECHNIQUES AND ANALYSIS, 1998, 3478 :444-447

[2] Measuring surface shape from specular reflection image sequence - Quantitative evaluation of surface defects of plastic moldings [J].

Miike, H ;

Koga, K ;

Yamada, T ;

Kawamura, T ;

Kitou, M ;

Takikawa, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1995, 34 (12A) :L1625-L1628

[3]

MIYAZAKI K, 1974, SICE, V10, P540

[4] SPECULAR SURFACE INSPECTION USING STRUCTURED HIGHLIGHT AND GAUSSIAN IMAGES [J].

NAYAR, SK ;

SANDERSON, AC ;

WEISS, LE ;

SIMON, DA .

IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, 1990, 6 (02) :208-218

[5] DETERMINING SHAPE AND REFLECTANCE OF HYBRID SURFACES BY PHOTOMETRIC SAMPLING [J].

NAYAR, SK ;

IKEUCHI, K ;

KANADE, T .

IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, 1990, 6 (04) :418-431

[6]

Nishimura T., 1992, Transactions of the Institute of Electrical Engineers of Japan, Part C, V112-C, P97

[7] New optical sensing system for obtaining the three-dimensional shape of specular objects [J].

Ryu, YK ;

Cho, HS .

OPTICAL ENGINEERING, 1996, 35 (05) :1483-1495

[8]

WANG Z, 1993, T IEICE JAPAN, V3, P575

[9]

YAMADA K, 1996, T ICICE JAPAN, V3, P374

← 1 →