Atomic layer deposition of W on nanoporous carbon aerogels

被引:42
作者
Elam, J. W. [1 ]
Libera, J. A. [1 ]
Pellin, M. J. [1 ]
Zinovev, A. V. [1 ]
Greene, J. P. [1 ]
Nolen, J. A. [1 ]
机构
[1] Argonne Natl Lab, Argonne, IL 60439 USA
关键词
D O I
10.1063/1.2245216
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this study, the authors demonstrate the ability to apply precise, conformal W coatings onto all surfaces of nanoporous carbon aerogels using atomic layer deposition (ALD). The resulting material has a filamentous structure in which the W completely encapsulates the carbon aerogel strands. The material mass increases nonlinearly with W coating, achieving a tenfold increase following ten ALD cycles. The aerogel surface area increases by nearly a factor of 2 after ten W ALD cycles. This conformal metal coating of extremely high aspect ratio nanoporous materials by ALD represents a unique route to forming metal functionalized high surface area materials.
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页数:3
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