Modeling of chemical processes in the low pressure capacitive radio frequency discharges in a mixture of Ar/C2H2

被引：26

作者：

Ariskin, D. A. ^{[1
,2
]}

Schweigert, I. V. ^{[1
,2
]}

Alexandrov, A. L. ^{[1
]}

Bogaerts, A. ^{[3
]}

Peeters, F. M. ^{[2
]}

机构：

[1] Russian Acad Sci, Inst Theoret & Appl Mech, Novosibirsk 630090, Russia

[2] Univ Antwerp, Dept Fys, B-2020 Antwerp, Belgium

[3] Univ Antwerp, Dept Chem, B-2610 Antwerp, Belgium

来源：

JOURNAL OF APPLIED PHYSICS | 2009年 / 105卷 / 06期

关键词：

argon; electronegativity; gas mixtures; high-frequency discharges; plasma chemistry; reaction kinetics theory; COLLISION CROSS-SECTIONS; REACTIVE PLASMAS; CARBON; ELECTRONS; DEPOSITION; SIMULATION; EMISSION; HYDROGEN; GROWTH; GASES;

D O I：

10.1063/1.3095760

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We study the properties of a capacitive 13.56 MHz discharge with a mixture of Ar/C2H2 taking into account the plasmochemistry and growth of heavy hydrocarbons. A hybrid model was developed to combine the kinetic description for electron motion and the fluid approach for negative and positive ion transports and plasmochemical processes. A significant change in plasma parameters related to injection of 5.8% portion of acetylene in argon was observed and analyzed. We found that the electronegativity of the mixture is about 30%. The densities of negatively and positively charged heavy hydrocarbons are sufficiently large to be precursors for the formation of nanoparticles in the discharge volume.

引用

页数：9

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