Improvement in electron emission from carbon nanotube cathodes after Ar plasma treatment

被引:46
作者
Kanazawa, Y
Oyama, T
Murakami, K
Takai, M
机构
[1] Osaka Univ, Res Ctr Mat Sci Extreme Condit, Toyonaka, Osaka 5608531, Japan
[2] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 03期
关键词
D O I
10.1116/1.1667518
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Carbon nanotube (CNT) cathode surfaces have been exposed to Ar plasma and the emission characteristics were measured. When a CNT cathode was exposed to Ar plasma for 3 min, the emission characteristics were improved. The emission current increased after an Ar plasma treatment for 3 min by three orders of magnitude from 9.0 x 10(-5) to 3.3 x 10(-1) mA/cn(2) at 4.0 V/mum with a decrease in turn-on voltage from 3.3 to 1.7 V/mum. According to scanning electron microscopy images, entangled CNT bundles were raveled out by Ar plasma treatment. (C) 2004 American Vacuum Society.
引用
收藏
页码:1342 / 1344
页数:3
相关论文
共 7 条
[1]   ALIGNED CARBON NANOTUBE ARRAYS FORMED BY CUTTING A POLYMER RESIN-NANOTUBE COMPOSITE [J].
AJAYAN, PM ;
STEPHAN, O ;
COLLIEX, C ;
TRAUTH, D .
SCIENCE, 1994, 265 (5176) :1212-1214
[2]  
Choi SH, 2001, IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE, P35, DOI 10.1109/IVMC.2001.939640
[3]   HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].
IIJIMA, S .
NATURE, 1991, 354 (6348) :56-58
[4]   Hydrogen storage in single-walled carbon nanotubes at room temperature [J].
Liu, C ;
Fan, YY ;
Liu, M ;
Cong, HT ;
Cheng, HM ;
Dresselhaus, MS .
SCIENCE, 1999, 286 (5442) :1127-1129
[5]   MECHANICAL AND THERMAL-PROPERTIES OF CARBON NANOTUBES [J].
RUOFF, RS ;
LORENTS, DC .
CARBON, 1995, 33 (07) :925-930
[6]  
TAKAI M, SID 03, P794
[7]   Field emission characteristics of screen-printed carbon nanotube after laser irradiation [J].
Zhao, WJ ;
Sawada, A ;
Takai, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (6B) :4314-4316