Photocrosslinking system based on a poly(vinyl phenol)/thermally degradable diepoxy crosslinker blend

被引:33
作者
Okamura, H [1 ]
Toda, S [1 ]
Tsunooka, M [1 ]
Shirai, M [1 ]
机构
[1] Univ Osaka Prefecture, Grad Sch Engn, Dept Appl Chem, Sakai, Osaka 5998531, Japan
关键词
photocrosslinking; decrosslinking; thermal degradation; epoxides; photo-acid generator; poly(vinyl phenol); photoresists; crosslinking; degradation;
D O I
10.1002/pola.10394
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Photocrosslinkable systems with thermally cleavable properties based on blends of poly(vinyl phenol) (PVP) and diepoxides were investigated. Thermally cleavable diepoxides as crosslinkers were prepared and characterized. As a thermally cleavable linkage, a tertiary ester moiety was incorporated into the crosslinker molecule. PVP/crosslinker blended films containing photoacid generators (PAGs) became insoluble in solvents after UV irradiation and subsequent post-exposure-bake (PEB) treatment. With a rise in the PEB temperature, the insoluble fraction of the irradiated films increased, passed through a maximum value, decreased, and increased again at elevated baking temperatures. The insolubilization. profiles of the irradiated films were complicated and strongly dependent on the type of PAG used, the structure of the crosslinkers, and the PVP/crosslinker ratio. A mechanism for the thermal degradation was studied with Fourier transform infrared spectroscopy. (C) 2002 Wiley Periodicals, Inc.
引用
收藏
页码:3055 / 3062
页数:8
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