Beam-adjustment-free crosstalk reduction in 10GHz-spaced arrayed-waveguide grating via photosensitivity under UV laser irradiation through metal mask

被引：50

作者：

Takada, K ^{[1
]}

Tanaka, T ^{[1
]}

Abe, M ^{[1
]}

Yanagisawa, T ^{[1
]}

Ishii, M ^{[1
]}

Okamoto, K ^{[1
]}

机构：

[1] Nippon Telegraph & Telephone Corp, NTT Photon Labs, Tokai, Ibaraki 3191193, Japan

来源：

ELECTRONICS LETTERS | 2000年 / 36卷 / 01期

关键词：

D O I：

10.1049/el:20000021

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The crosstalk of a 10GHz-spaced 32 channel arrayed-waveguide grating has been reduced from -17 to -30dB and from -16 to -27dB for the TE and TM modes, respectively, via the photosensitivity under 193nm ArF excimer laser irradiation. A metal mask with a window was placed on the arrayed waveguides and the unmasked arrayed waveguides were irradiated until the crosstalk was reduced to the desired value. This technique means that fine adjustment of the laser beam on individual arrayed waveguides is no longer necessary.

引用

页码：60 / 61

页数：2

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