New light sources and sensors for active optical 3D-inspection

被引：21

作者：

Osten, W ^{[1
]}

Jüptner, W ^{[1
]}

机构：

[1] Bremer Inst Angew Strahltechn, D-28359 Bremen, Germany

来源：

ADVANCED PHOTONIC SENSORS AND APPLICATIONS | 1999年 / 3897卷

关键词：

active optical metrology; 3D-inspection; light valve technology; CMOS-sensor; optical shape measurement; near field optics;

D O I：

10.1117/12.369322

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The implementation of active processing strategies in optical 3D-inspection needs the availability of flexible hardware solutions. The system components illumination and sensor/detector are actively involved in the processing chain by a feedback loop that is controlled by the evaluation process. Therefore this article deals with new light sources and sensors which appeared recently on the market and can be applied successfully for the implementation of active processing principles. Some applications where such new components are used to implement an active measurement strategy are presented.

引用

页码：314 / 327

页数：4

共 24 条

[1] WHAT I HAVE LEARNED - REPLY [J].

ALOIMONOS, Y .

CVGIP-IMAGE UNDERSTANDING, 1994, 60 (01) :74-85

[2]

Besl P.J., 1989, Advances in Machine Vision, P1

[3]

Carlson B., 1998, ADV IMAGING MAY, P62

[4]

CHANGHASNAIN CJ, 1998, OPTICS PHOTONICS MAY, P35

[5]

Fossum ER, 1999, LASER FOCUS WORLD, V35, P101

[6]

FRANKOWSKI G, 1997, P FRING 97, P533

[7]

*GF MESST, 1999, PROD DOC DMD SHAP ME

[8]

HANSON SG, 1999, IN PRESS P SPIE, V3824

[9]

HORN BKP, 1977, ARTIFICIAL INTELLIGE, V8

[10] Color-encoded fringe projection and phase shifting for 3-D surface contouring [J].

Huang, PS ;

Hu, QY ;

Jin, F ;

Chiang, FP .

INTERNATIONAL CONFERENCE ON APPLIED OPTICAL METROLOGY, 1998, 3407 :477-482

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