Contact angle hysteresis: Study by dynamic cycling contact angle measurements and variable angle spectroscopic ellipsometry on polyimide

被引:46
作者
Hennig, A
Eichhorn, KJ
Staudinger, U
Sahre, K
Rogalli, M
Stamm, M
Neumann, AW
Grundke, K
机构
[1] Leibniz Inst Polymer Res Dresden, Dept Polymer Interfaces, D-01069 Dresden, Germany
[2] Univ Toronto, Dept Mech & Ind Engn, Toronto, ON M5S 3G8, Canada
[3] Infineon Technol AG Germany, D-01099 Dresden, Germany
关键词
D O I
10.1021/la036411l
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The phenomenon of contact angle hysteresis was studied on smooth films of polyimide, a polymer type used in the microelectronic industry, by dynamic cycling contact angle measurements based on axisymmetric drop shape analysis-profile in combination with variable angle spectroscopic ellipsometry (VASE). It was found that both advancing and receding contact angles became smaller with increasing the number of cycles and are, therefore, not a property of the dry solid alone. The changes of the wetting behavior during these dynamic cycling contact angle measurements are attributed mainly to swelling and/or liquid retention. To reveal the water-induced changes of the polymer film, the polyimide surface was studied before and after the contact with a water droplet by VASE. Both the experimental ellipsometric spectrum for Delta and that for Psi as well as the corresponding simulations show characteristic shifts due to the contact with water. The so-called effective medium approximation was applied to recover information about the thickness and effective optical constants of the polymer layer from the ellipsometrically measured values of Delta and Psi. On the basis of these results, the swelling and retention behavior of the polyimide films in contact with water droplets were discussed.
引用
收藏
页码:6685 / 6691
页数:7
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