Absolute three-dimensional shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection

被引：46

作者：

Takeda, M

Aoki, T

Miyamoto, Y

Tanaka, H

Gu, RW

Zhang, ZB

机构：

[1] Univ Electrocommun, Dept Informat & Commun Engn, Chofu, Tokyo 182, Japan

[2] OPTON Co Ltd, Res Lab 3D, Aichi 4898645, Japan

来源：

OPTICAL ENGINEERING | 2000年 / 39卷 / 01期

关键词：

profilometry; shape measurement; optical metrology; three-dimensional sensing;

D O I：

10.1117/1.602336

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

For the absolute and shade-free shape measurement of 3-D objects with large height discontinuities, a coaxial optical sensor system with a common image plane for pattern projection and observation is proposed. Experimental results are presented that demonstrate the shape measurements of objects with a deep hole and large discontinuities. (C) 2000 Society of Photo-Optical instrumentation Engineers. [S0091-3286(00)00701-7].

引用

页码：61 / 68

页数：8

共 18 条

[1]

[Anonymous], 1990, CONFOCAL MICROSCOPY

[2] 3-DIMENSIONAL SENSING OF ROUGH SURFACES BY COHERENCE RADAR [J].