Template-growth of highly ordered carbon nanotube arrays on silicon

被引：10

作者：

Yin, Aijun ^{[1
]}

Tzolov, Marian

Cardimona, David A.

Xu, Jimmy

机构：

[1] Brown Univ, Div Engn, Providence, RI 02912 USA

[2] USAF, Space Vehicle Directorate, Res Lab, Kirtland AFB, NM 87117 USA

[3] Brown Univ, Dept Phys, Providence, RI 02912 USA

来源：

IEEE TRANSACTIONS ON NANOTECHNOLOGY | 2006年 / 5卷 / 05期

关键词：

anodic aluminum oxide template; carbon nanotubes (CNTs); silicon;

D O I：

10.1109/TNANO.2006.880433

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the success in and the key conditions for direct growth of carbon nanotubes of unprecedented uniformity on silicon. The uniformity is ensured through the growth within the highly ordered nanopores of an alumina oxide template, which is in turn formed on silicon through anodization of aluminum of unprecedented thickness evaporated on silicon. The formation of highly ordered nanopore array by anodization of thick aluminum evaporated on a noncompliant substrate such as silicon is made possible through a specially designed process for evaporating thick aluminum of high quality and good adhesion.

引用

页码：564 / 567

页数：4

共 23 条

[1] Purification and structural annealing of multiwalled carbon nanotubes at graphitization temperatures [J].