Compliant thermal microactuators

被引：42

作者：

Jonsmann, J

Sigmund, O

Bouwstra, S

机构：

[1] Tech Univ Denmark, Mikroelekt Ctr, DK-2800 Lyngby, Denmark

[2] Tech Univ Denmark, Dept Solid Mech, DK-2800 Lyngby, Denmark

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 76卷 / 1-3期

关键词：

compliant; thermal; microactuators; topology optimisation; fast prototyping; electroplating;

D O I：

10.1016/S0924-4247(99)00011-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Two dimensional compliant metallic thermal microactuators are designed using topology optimisation, and microfabricated using rapid prototyping techniques. Structures are characterised using advanced image analysis, yielding a very high precision. Characterised structures behave in accordance with the intended behaviour. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：463 / 469

页数：7

共 3 条

[1] Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio [J].