A theoretical model for laser removal of particles from solid surfaces

被引：96

作者：

Lu, YF ^{[1
]}

Song, WD ^{[1
]}

Ang, BW ^{[1
]}

Hong, MH ^{[1
]}

Chan, DSH ^{[1
]}

Low, TS ^{[1
]}

机构：

[1] NATL UNIV SINGAPORE,DATA STORAGE INST,SINGAPORE 119260,SINGAPORE

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1997年 / 65卷 / 01期

关键词：

D O I：

10.1007/s003390050533

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A theoretical model for laser cleaning of microparticles from solid surfaces was established by taking the adhesion force (van der Waals force) and cleaning force (due to thermal expansion) into account. The cleaning conditions and threshold can be obtained from this model. Theoretical predictions have been verified by the experimental results for removing aluminium particles from a quartz substrate. It was found that laser irradiation from the back of the substrate is more effective in removing particles with different sizes than that from the front. With laser irradiation from the back, large particles can be removed more easily than small ones. However, with laser irradiation from the front, smaller particles can be removed more easily.

引用

页码：9 / 13

页数：5

共 24 条

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