3D hydrogen microscopy with sub-ppm detection limit

被引：24

作者：

Reichart, P ^{[1
]}

Dollinger, G ^{[1
]}

Bergmaier, A ^{[1
]}

Datzmann, G ^{[1
]}

Hauptner, A ^{[1
]}

Körner, HJ ^{[1
]}

Krücken, R ^{[1
]}

机构：

[1] Tech Univ Munich, Dept Phys E12, D-85748 Garching, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2004年 / 219卷

关键词：

hydrogen analysis; 3D hydrogen imaging; proton-proton scattering; proton microprobe; irradiation damage; CVD diamond;

D O I：

10.1016/j.nimb.2004.01.200

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Coincident elastic proton-proton scattering at a 17 MeV microprobe is used to investigate hydrogen distributions on microscopic scale inside freestanding samples up to some 100 mum thickness. Hydrogen imaging at atomic ppm level needs a total count rate of about 100 kHz of scattered protons in order to get sufficient statistics from the small fraction of coincident hydrogen signals. It is obtained using a highly segmented silicon strip detector of 2.3 sr for proton currents of less than 100 pA impinging on films thicker 10 mum. A five level filter almost completely suppresses accidental coincidences. The sensitivity of this kind of 3D hydrogen microscopy is demonstrated by the analysis of a 55 mum thick synthetic diamond layer showing a detection limit of 0.08 at-ppm hydrogen. In addition, the proposed depth resolution of 3-6 mum is experimentally confirmed and a lateral resolution of 0.6 mum full width half maximum is obtained at a significant hydrogen enhancement inside the layer. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：980 / 987

页数：8

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