A MEMS acoustic energy harvester

被引：189

作者：

Horowitz, S. B. ^{[1
]}

Sheplak, M.

Cattafesta, L. N., III

Nishida, T.

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Interdisciplinary Microsyst Grp, Gainesville, FL 32611 USA

[2] Univ Florida, Dept Aerosp & Mech Engn, Interdisciplinary Microsyst Grp, Gainesville, FL 32611 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2006年 / 16卷 / 09期

关键词：

D O I：

10.1088/0960-1317/16/9/S02

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the development of a micromachined acoustic energy harvester for aeroacoustic applications. The acoustic energy harvester employs a silicon-micromachined circular, piezoelectric composite diaphragm for electroacoustic transduction. Lumped element modeling, design, fabrication and characterization of a micromachined acoustic energy harvester prototype are presented. Experimental results indicate a maximum output power density of 0.34 mu W cm(-2) at 149 dB (ref. 20 mu Pa) and suggest a potential output power density, for this design, of 250 mu W cm(-2) with an improved fabrication process.

引用

页码：S174 / S181

页数：8

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[2]

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