Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever-based microsystem

被引：2

作者：

Bardinala, Veronique ^{[1
]}

Daran, Emmanuelle ^{[1
]}

Vergnenegre, Corinne ^{[1
]}

Leichle, Thierry ^{[1
]}

Segui, Yvan ^{[2
]}

Camps, Thierry ^{[1
]}

Pourciel, Jean-Bernard ^{[1
]}

Conedera, Veronique ^{[1
]}

Gavin-Djidina, Leonard ^{[1
]}

Guirardel, Mathieu ^{[3
]}

机构：

[1] CNRS, LAAS, 7 Ave Colonel Roche, F-31077 Toulouse 04, France

[2] Univ Paul Sabatier, LGET, F-31062 Toulouse, France

[3] Rhodia Lab Futur, F-33608 Pessac, France

来源：

MICRO-OPTICS, VCSELS, AND PHOTONIC INTERCONNECTS II: FABRICATION, PACKAGING, AND INTEGRATION | 2006年 / 6185卷

关键词：

VCSEL; polymer; micro-optics; microcantilevers; plasma treatment; SU-8;

D O I：

10.1117/12.662800

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on the design and the fabrication of refractive microlenses using a polymer droplet deposition microsystem. The principle of this original technique consists in monomer droplets deposition using a robotized silicon-microcantilevers array. The advantages of this technique rely on the control of droplets dimensions and the positioning accuracy. Microlenses have been first modelled to optimize their geometrical parameters for VCSEL collimation. Results of lens optimization as well as the influence of the fabrication parameters fluctuations on the final divergence are detailed. First results on droplets deposition are presented, demonstrating the technique feasibility. Finally, the possibility of the modification of the surface energy to obtain the most suited contact angle before deposition is also discussed.

引用

页数：9

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