Thin film SOI emerges

被引:21
作者
Alles, ML
机构
[1] Ibis Technology Corp, Danvers
关键词
D O I
10.1109/6.591663
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
As companies, universities, government agencies, and consortia throughout the world address silicon-on-insulator (SOI) technology, the supply of less expensive yet high-quality SOI materials is growing, and the grasp of the fabrication process strengthening. And as applications for the technology increase, the focus today is shifting from issues of feasibility to issues of circuit design and yield. Thin-film structures has its rewards in such applications as high-voltage smart-power integrated sensors, three-dimensional devices, optoelectronic circuits, and radiation-tolerant circuits.
引用
收藏
页码:37 / 45
页数:9
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