A 12 MHz micromechanical bulk acoustic mode oscillator

被引：108

作者：

Mattila, T

Kiihamäki, J

Lamminmäki, T

Jaakkola, O

Rantakari, P

Oja, A

Seppä, H

Kattelus, H

Tittonen, I

机构：

[1] VTT Microsensing, Espoo 02044, Finland

[2] VTT Microelect, Espoo 02044, Finland

[3] Helsinki Univ Technol, Metrol Res Inst, FIN-02150 Espoo, Finland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 101卷 / 1-2期

关键词：

micromechanical resonator; bulk acoustic wave; electromechanical coupling; oscillator noise;

D O I：

10.1016/S0924-4247(02)00204-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than -115 dBc/Hz at 1kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 9

页数：9

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