Mechanism of nitrogen incorporation into amorphous-CNx films formed by plasma-enhanced chemical-vapor deposition of the doublet and quartet states of the CN radical

被引：40

作者：

Ito, H ^{[1
]}

Ito, N ^{[1
]}

Takahashi, T ^{[1
]}

Takamatsu, H ^{[1
]}

Tanaka, D ^{[1
]}

Saitoh, H ^{[1
]}

机构：

[1] Nagaoka Univ Technol, Dept Chem, Nagaoka, Niigata 9402188, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 3A期

关键词：

optical emission spectroscopy; CN; electronic states; microwave plasma; rf plasma; chemical-vapor deposition; amorphous-CNx films; mechanism of film formation;

D O I：

10.1143/JJAP.39.1371

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High-resolution CN(B-2 Sigma(+)-X(2)Sigma(+))emission spectra were observed for the various processes to form amorphous-CNx (a-CNx) films using the plasma-enhanced chemical-vapor deposition of the CN radical produced from the dissociative excitation reactions of cyanides. A strong correlation was confirmed between the electronic states of CN in the plasma and the bonding states of nitrogen atoms in the films. The (4)Sigma(+) and (4)Pi states of CN were the precursors of the one- and/or two-dimensional C=N and C-N network structures of the films with high nitrogen content, [N]/([N]+[C]) less than or equal to 0.5. The CN(X(2)Sigma(+)) state formed the C=N terminations primarily, a part of which changed to the one-dimensional C=N network from the additive reactions. The above correlation was fully explained by the molecular orbitals and the electronic configurations for the relevant electronic states of CN.

引用

页码：1371 / 1377

页数：7

共 41 条

[1] PROPERTIES OF NITROGEN-DOPED AMORPHOUS HYDROGENATED CARBON-FILMS [J].

AMIR, O ;

KALISH, R .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (09) :4958-4962

[2] Dissociation of cyanogen azide: An alternative route to synthesis of carbon nitride [J].

Benard, DJ ;

Linnen, C ;

Harker, A ;

Michels, HH ;

Addison, JB ;

Ondercin, R .

JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (31) :6010-6019

[3] LASER EXCITATION OF THE CN B2-SIGMA+]-A2-PI 0-0 AND 1-0 BANDS [J].

CONLEY, C ;

HALPERN, JB ;

WOOD, J ;

VAUGHN, C ;

JACKSON, WM .

CHEMICAL PHYSICS LETTERS, 1980, 73 (02) :224-227

[4] FINE-STRUCTURE OF THE B2SIGMA+ AND A4SIGMA+ STATES OF CN AS DETERMINED BY MOLECULAR ANTICROSSING SPECTROSCOPY [J].

COOK, JM ;

ZEGARSKI, BR ;

MILLER, TA .

JOURNAL OF CHEMICAL PHYSICS, 1979, 70 (08) :3739-3744

[5] PRODUCTION OF QUARTET CN [J].

COOK, JM ;

ZEGARSKI, BR ;

MILLER, TA .

JOURNAL OF CHEMICAL PHYSICS, 1978, 68 (10) :4763-4764

[6] EXCITATION OF CN VIOLET (B 2SIGMA+-X2SIGMA+) AND RED (A 2PI-IOTA X 2SIGMA+) BANDS BY REACTION OF AR AND XE METASTABLE ATOMS WITH CN-CONTAINING COMPOUNDS [J].

COXON, JA ;

SETSER, DW ;

DUEWER, WH .

JOURNAL OF CHEMICAL PHYSICS, 1973, 58 (06) :2244-2257

[7]

COXON JA, 1975, CAN J PHYS, V53, P145

[8] Radical and film growth kinetics in methane radio-frequency glow discharges [J].

Dagel, DJ ;

Mallouris, CM ;

Doyle, JR .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (11) :8735-8747

[9] Optical emission spectroscopy of molecular species in plasma induced by laser ablation of carbon in nitrogen [J].

Dinescu, G ;

Aldea, E ;

De Giorgi, ML ;

Luches, A ;

Perrone, A ;

Zocco, A .

APPLIED SURFACE SCIENCE, 1998, 127 :697-702

[10] COLLISIONAL TRANSITION PROBABILITIES FOR ROTATIONAL LEVELS OF CN(B2SIGMA+) [J].

DUEWER, WH ;

COXON, JA ;

SETSER, DW .

JOURNAL OF CHEMICAL PHYSICS, 1972, 56 (09) :4355-&

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