Preparation of Cu(In,Ga)Se2 thin films from In-Ga-Se precursors for high-efficiency solar cells

被引:49
作者
Nishiwaki, S [1 ]
Satoh, T [1 ]
Hayashi, S [1 ]
Hashimoto, Y [1 ]
Negami, T [1 ]
Wada, T [1 ]
机构
[1] Matsushita Elect Ind Co Ltd, Cent Res Labs, Seika, Kyoto 6190237, Japan
关键词
D O I
10.1557/JMR.1999.0613
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Growth of Cu(In,Ga)Se-2 (CIGS) films from In-Ga-Se precursors was characterized by scanning Auger electron spectroscopy (SAES), secondary ion mass spectroscopy (SIMS), x-ray diffraction, scanning electron microscopy, and transmission electron microscopy (TEM). In-Ga-Se precursor layers were deposited on Mo-coated soda-lime glass, and then the layers were exposed to Cu and Se fluxes to form CIGS films. The SIMS and SAES analyses showed a homogeneous distribution of Cu throughout the CIGS films during the deposition of Cu and Se. The phase changes observed in the CIGS films during the deposition of Cu and Se on the In-Ga-Se precursor films were as follows: (In,Ga)(2)Se-3 --> [Cu(In,Ga)(5)Se-8] --> Cu(In,Ga)(3)Se-5 --> Cu(In,Ga)Se-2. The grain size increased from the submicron grains of the (In,Ga)(2)Se-3 precursor film to several micrometers in the stoichiometric Cu(In,Ga)Se-2 film. A growth model of CIGS crystals is introduced on the basis of the results of TEM observations. CIGS crystals are mainly grown under (In,Ga)-rich conditions in the preparation from In-Ga-Se precursor films.
引用
收藏
页码:4514 / 4520
页数:7
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