A transmission x-ray microscope based on secondary-electron imaging

A design for a transmission x-ray microscope with 20 nm transverse spatial resolution is presented. The microscope, which is based on the electron-optical imaging of the photoemitted electrons from an x-ray shadowgraph, consists of a transmission x-ray photocathode coupled to a photoelectron emission microscope (PEEM-also called a PEM for photoelectron microscope). Unlike the conventional PEEM, which produces a surface map of photoelectron yield. this microscope can provide in-formation on the subsurface properties of thin samples. The analysis of the microscope's electron-optical performance is based on the evaluation of Gaussian focusing properties and third-order aberration coefficients computed using several complementary methods. The electron optical properties of the microscope are examined with an emphasis on issues affecting overall performance and achieving the best possible resolution. Preliminary experimental results using a cesium iodide photocathode are shown. (C) 1997 American Institute of Physics.