Fabrication and characterization of truly 3-D diffuser/nozzle microstructures in silicon

被引：43

作者：

Heschel, M

Mullenborn, M

Bouwstra, S

机构：

[1] Mikroelektronik Centret

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1997年 / 6卷 / 01期

关键词：

diffuser; laser micromachining; micropump; nozzle; 3-D microstructures;

D O I：

10.1109/84.557529

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present microfabrication and characterization of truly three-dimensional (3-D) diffuser/nozzle structures in silicon. Chemical vapor deposition (CVD), reactive ion etching (RIE), and laser-assisted etching are used to etch flow chambers and diffuser/nozzle elements. The flow behavior of the fabricated elements and the dependence of diffuser/nozzle efficiency on structure geometry has been investigated. The large freedom of 3-D micromachining combined with rapid prototyping allows to characterize and optimize diffuser/nozzle structures.

引用

页码：41 / 47

页数：7

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