Properties of hard magnetic Nd-Fe-B films versus different sputtering conditions

被引：20

作者：

Lileev, AS

Parilov, AA

Blatov, VG

机构：

[1] Technol Univ, Moscow State Inst Steel & Alloys, MISA, Moscow 119991, Russia

[2] Specialized Hysteresis Design Off, Moscow 121170, Russia

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2002年 / 242卷

关键词：

coercivity; thin films; hard magnetic materials;

D O I：

10.1016/S0304-8853(01)01269-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hard magnetic Nd-Fe-B alloy films with thickness 50 60 mkm are received by ion plasma sputtering of Nd18Fe74B8 compound cast target in this investigation. In this investigation the interval of substrate temperatures and annealing temperatures when the crystal texture is forming with 'c' axes beyond the out of the film is determined. The influence of substrate material (Mo, Ni. Cu) on the formtion of texture direction and magnetic properties is studied. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：1300 / 1303

页数：4

共 16 条

[1] (Nd,Tb)-Fe-B thin film magnets prepared by magnetron sputtering [J].

Araki, T ;

Okabe, M .

NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, :244-249

[2]

BELMANS R, 1998, P 6 INT C NEW ACT BR, P537

[3] MAGNETIC-PROPERTIES OF SPUTTERED ND-FE-B FILMS [J].