Opportunities and technical strategies for silicon carbide device development

被引:33
作者
Cooper, JA [1 ]
机构
[1] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
来源
SILICON CARBIDE AND RELATED MATERIALS 2001, PTS 1 AND 2, PROCEEDINGS | 2002年 / 389-3卷
关键词
bipolar transistors; BJTs; GTOs; IMPATT diode oscillators; JFETs; MESFETs; microwave devices; MOS mobility; MOSIFETs; PiN diodes; power switching devices; Schottky diodes; SiC; SITs; static induction transistors; thyristors;
D O I
10.4028/www.scientific.net/MSF.389-393.15
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The number of people working on SiC worldwide is small compared to the number working on silicon or GaAs, so our development efforts need to be carefully focused. We need to concentrate on devices that have the greatest likelihood of penetrating the existing market or creating new markets, particularly those that take advantage of the unique properties of SiC to achieve performance not available in silicon.
引用
收藏
页码:15 / 20
页数:6
相关论文
共 25 条
[1]  
ASANO K, 2001, P13 INT S POW SEM DE
[2]  
Baliga BJ, 1996, INST PHYS CONF SER, V142, P1
[3]   Dopant activation and surface morphology of ion implanted 4H and 6H silicon carbide [J].
Capano, MA ;
Ryu, S ;
Melloch, MR ;
Cooper, JA ;
Buss, MR .
JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (04) :370-376
[4]  
CHOW TP, COMMUNICATON
[5]   Effect of nitric oxide annealing on the interface trap densities near the band edges in the 4H polytype of silicon carbide [J].
Chung, GY ;
Tin, CC ;
Williams, JR ;
McDonald, K ;
Di Ventra, M ;
Pantelides, ST ;
Feldman, LC ;
Weller, RA .
APPLIED PHYSICS LETTERS, 2000, 76 (13) :1713-1715
[6]  
DAS MK, 1999, ELECT MAT C SANT BAR
[7]  
DAS MK, MATL SCI FORUM, V338, P1069
[8]  
DAS MK, 2000, IEEE DEV RES C DENV
[9]   A novel self-aligned fabrication process for microwave static induction transistors in silicon carbide [J].
Henning, JP ;
Przadka, A ;
Melloch, MR ;
Cooper, JA .
IEEE ELECTRON DEVICE LETTERS, 2000, 21 (12) :578-580
[10]  
LENDENMANN H, MATL SCI FORUM, V338, P1423