Level-set method for island dynamics in epitaxial growth

被引:74
作者
Ratsch, C [2 ]
Gyure, MF
Caflisch, RE
Gibou, F
Petersen, M
Kang, M
Garcia, J
Vvedensky, DD
机构
[1] Univ London Imperial Coll Sci Technol & Med, Blackett Lab, London SW7 2BZ, England
[2] Univ Calif Los Angeles, Dept Math, Los Angeles, CA 90095 USA
[3] HRL Labs LLC, Malibu, CA 90265 USA
[4] Georgia Inst Technol, Sch Phys, Atlanta, GA 30332 USA
关键词
D O I
10.1103/PhysRevB.65.195403
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A level-set model for the simulation of epitaxial growth is described. In this model, the motion of island boundaries of discrete atomic layers is determined by the time evolution of a continuous level-set function Phi. The adatom concentration is treated in a mean-field manner. We use this model to systematically examine the importance of various fluctuations in the submonolayer and multilayer regimes. We find that, in the submonolayer regime for large values of D/F, the dominant fluctuations are associated with the spatial seeding of islands. We also show how different microscopic mechanisms can be included into this formalism. In the multilayer regime, our model exhibits surface roughening.
引用
收藏
页码:1954031 / 19540313
页数:13
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