AC scanning thermal microscopy:: Tip-sample interaction and buried defects modellings

Modellings describing the different thermal interactions between a sample surface and a probe in case of modulated heated probe are given and analysed. To obtain more reliable thermal data for a full calibration of thermal microscope or quantitative interpretations, these models are developed in three dimensions. The scattering of the thermal waves on buried small thermal resistances is theoretically studied. Lateral resolutions for the amplitude and phase of the probe's a,c. thermal response are obtained. (C) 2000 Editions scientifiques et medicales Elsevier SAS.