Su-8 based piezoresistive mechanical sensor

被引：26

作者：

Thaysen, J ^{[1
]}

Yalçinkaya, AD ^{[1
]}

Vestergaard, RK ^{[1
]}

Jensen, S ^{[1
]}

Mortensen, MW ^{[1
]}

Vettiger, P ^{[1
]}

Menon, A ^{[1
]}

机构：

[1] Tech Univ Denmark, CANTION AS, CAT, DK-2800 Lyngby, Denmark

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984267

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.

引用

页码：320 / 323

页数：4

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