Rapidly grown IBAD LiPON films with high Li-ion conductivity and electrochemical stability

被引：34

作者：

Vereda, F ^{[1
]}

Goldner, RB ^{[1
]}

Haas, TE ^{[1
]}

Zerigian, P ^{[1
]}

机构：

[1] Tufts Univ, Electroopt Technol Ctr, Medford, MA 02155 USA

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2002年 / 5卷 / 11期

关键词：

D O I：

10.1149/1.1508550

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

LiPON films have been produced by nitrogen ion beam assisted deposition (IBAD) of thermally evaporated Li3PO4. This process allowed us to rapidly deposit X-ray amorphous LiPON films with densities close to that of the handbook value for Li3PO4, high ionic conductivity (1.6 x 10(26) S/cm), electronic conductivity smaller than 8 x 10(-13) S/cm, and an electrochemical stability window of over 6.0 V. These properties, combined with the high deposition rates that can be achieved with this process (>1.0 nm/s), make it an attractive candidate for industrial production of LiPON thin films for Li-ion batteries. (C) 2002 The Electrochemical Society.

引用

页码：A239 / A241

页数：3

共 12 条

[1] ELECTRICAL-PROPERTIES OF AMORPHOUS LITHIUM ELECTROLYTE THIN-FILMS [J].

BATES, JB ;

DUDNEY, NJ ;

GRUZALSKI, GR ;

ZUHR, RA ;

CHOUDHURY, A ;

LUCK, CF ;

ROBERTSON, JD .

SOLID STATE IONICS, 1992, 53 :647-654

[2] Preferred orientation of polycrystalline LiCoO2 films [J].

Bates, JB ;

Dudney, NJ ;

Neudecker, BJ ;

Hart, FX ;

Jun, HP ;

Hackney, SA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (01) :59-70

[3]

Birke P., 1997, SOLID STATE IONICS, V93, P1

[4] CORROSION OF PHOSPHORUS OXYNITRIDE GLASSES IN WATER AND HUMID AIR [J].

BUNKER, BC ;

ARNOLD, GW ;

RAJARAM, M ;

DAY, DE .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1987, 70 (06) :425-430

[5]

*CRC, 1980, CRC HDB CHEM PHYS, pB92

[6] PREPARATION AND CHARACTERIZATION OF LITHIUM PHOSPHORUS OXYNITRIDE GLASS [J].

LARSON, RW ;

DAY, DE .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1986, 88 (01) :97-113

[7] Nitridation of glasses in the system R(2)O-MO-P2O5 [J].

Pascual, L ;

Duran, A .

MATERIALS RESEARCH BULLETIN, 1996, 31 (01) :77-95

[8] PREPARATION OF PHOSPHORUS OXYNITRIDE GLASSES [J].

REIDMEYER, MR ;

RAJARAM, M ;

DAY, DE .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1986, 85 (1-2) :186-203

[9]

Roh N.-S., 2000, SCRIPTA MATER, V42, P43

[10] A study of electronic shorting in IBDA-deposited Lipon films [J].

Vereda, F ;

Clay, N ;

Gerouki, A ;

Goldner, RB ;

Haas, T ;

Zerigian, P .

JOURNAL OF POWER SOURCES, 2000, 89 (02) :201-205

← 1 2 →