Writing submicrometric metallic patterns by ultraviolet synchrotron irradiation of nanostructured carbon and TiOx-carbon films

被引:10
作者
Caruso, T
Agostino, RG
Bongiorno, G
Barborini, E
Piseri, P
Milani, P
Lenardi, C
La Rosa, S
Bertolo, M
机构
[1] Univ Calabria, INFM, Dipartimento Fis, I-87036 Arcavacata Di Rende, CS, Italy
[2] Univ Milan, INFM, Dipartimento Fis, I-20133 Milan, Italy
[3] Univ Milan, CIMAINA, I-20133 Milan, Italy
[4] Univ Milan, INFM, Ist Fisiol Gen & Chim Biol, I-20134 Milan, Italy
[5] Univ Milan, CIMAINA, I-20134 Milan, Italy
[6] Sincrotrone Trieste, I-34012 Basovizza, Trieste, Italy
关键词
D O I
10.1063/1.1686890
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nanostructured carbon and carbon-TiOx films produced by supersonic cluster beam deposition have been characterized by spatially resolved (0.5 mum lateral resolution) photoemission spectroscopy with synchrotron light. We have found that pure and TiOx-containing nanostructured carbon is modified under high flux UV exposure showing the onset of a metallic character near the Fermi level. We have studied the spectroscopic features, the spatial confinement, and the kinetics of this metallization process of the irradiated regions. This effect allows one to write metallic patterns in the TiOx-containing films with a submicrometric resolution and with a fast kinetic. (C) 2004 American Institute of Physics.
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页码:3412 / 3414
页数:3
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