A new method of surface preparation for high spatial resolution EPMA/SEM with an argon ion beam

A novel specimen preparation method has been devised utilizing an Ar ion beam with a masking plate and an apparatus for this method has been developed for the preparation of good quality cross sections for high spatial resolution microscopy and microanalysis. This apparatus is defined as a Cross-section Polisher. The method overcomes most of the drawbacks inherent in the traditional method of mechanical grinding and polishing and enabled us to prepare good quality cross sections with much larger areas than those prepared by a focused ion beam method, essentially retaining the excellent characteristics of the latter method. Microstructural observations of corrosion morphology and chemical analysis of corrosion products in a corrosion-resistant alloy (Alloy 825) with a thermal field emission type electron probe X-ray microanalyzer are reported to show the power of the Cross-section Polisher.