Role of oxygen incorporation in Co-Cr-Pt-Si-O perpendicular magnetic recording media

被引:53
作者
Zheng, M [1 ]
Acharya, BR [1 ]
Choe, G [1 ]
Zhou, JN [1 ]
Yang, ZD [1 ]
Abarra, EN [1 ]
Johnson, KE [1 ]
机构
[1] MMC Technol, San Jose, CA 95131 USA
关键词
oxide media; oxygen content; perpendicular recording; recording performance;
D O I
10.1109/TMAG.2004.832167
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effect of oxygen incorporation on the crystallographic, magnetic, and recording performance of perpendicular magnetic recording (PMR) oxide media was investigated. The media were prepared by dc-magnetron sputtering of CoCrPt-SiO2 targets in an Ar/O-2 gas mixture. X-ray photoelectron spectroscopy (XPS) detected Cr-O peaks in the sputtered film, whereas no strong evidence Of SiO2 is seen. Moderate oxygen incorporation in the film (similar to15 at%) promotes Cr-O formation in the grain boundary and results in a dramatic increase of coercivity H, and signal-to-noise ratio (SNR). However, as the O-2 content is further increased, oxide incorporates into the core of the grains, resulting in decreased H-c, magnetization and SNR.
引用
收藏
页码:2498 / 2500
页数:3
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