Natural crystal habit and preferential growth directions during PVT of silicon carbide

被引:7
作者
Herro, ZG
Epelbaum, BM
Bickermann, M
Masri, P
Seitz, C
Magerl, A
Winnacker, A
机构
[1] Univ Erlangen Nurnberg, Dept Mat Sci 6, D-91058 Erlangen, Germany
[2] Univ Montpellier 2, Etud Semicond Grp, CNRS, UMR 5650, F-34095 Montpellier 5, France
[3] SiCrystal AG, D-91052 Erlangen, Germany
[4] Univ Erlangen Nurnberg, Dept Crystallog & Struct Phys, D-91054 Erlangen, Germany
来源
SILICON CARBIDE AND RELATED MATERIALS 2003, PTS 1 AND 2 | 2004年 / 457-460卷
关键词
(01-15); (-1100); crystal habit; facet stability;
D O I
10.4028/www.scientific.net/MSF.457-460.111
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have investigated preferential growth directions and natural crystal habit during PVT growth of SiC. It is shown that the (-1100), (-1101) and (-1102) planes do not develop stable atomically flat facets, but interfaces consisting of a mixture of different faces. Contrary, the (01-15) facet is the most stable after the conventional (0001) facet. Hollow micropipe defects propagating along the [0001] axis of the seed are vanished in the grown crystal during growth performed on (01-15) plane. Polytype information is transmitted along the c-axis. Hollow cores generated at latter stages of growth are however aligned along growth direction. Growth along [01-15] is shown to be very promising for preparation of micropipe-free SiC.
引用
收藏
页码:111 / 114
页数:4
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