A new SO2 sensor system with SAW and IDC elements

被引：14

作者：

Leidl, A ^{[1
]}

Hartinger, R ^{[1
]}

Roth, M ^{[1
]}

Endres, HE ^{[1
]}

机构：

[1] FRAUNHOFER INST FESTKORPERTECHNOL,D-80686 MUNICH,GERMANY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 34卷 / 1-3期

关键词：

surface acoustic wave transducer; surface transverse wave transducer; SO2 sensor system;

D O I：

10.1016/S0925-4005(96)01825-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Applying new transducer principles on well known indicator materials improves the performance of the whole system, especially the humidity interference. A well known SO2-sensitive material (heteropolysiloxane, NND/PTMS) was tested with a SAW (surface acoustic wave, surface transverse wave mode (STW)) transducer and an interdigital capacitor (IDC) device. Due to a different relative sensitivity of the coated IDC and SAW devices to SO2 and humidity, we were able to reduce the overall cross-sensitivity of the system to humidity significantly. The combination of these two different types of transducers, in case of need extended with other transducers, increases the performance of the sensor system.

引用

页码：339 / 342

页数：4

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