Continuous YBa2Cu3O7-delta film deposition by optically controlled reactive thermal co-evaporation

We built a thermal co-evaporation system to deposit YBCO films on large areas in a continuous process which requires some basic modifications to the established standard co-evaporation setup, An optical rate control system based on atomic absorption spectroscopy has been developed to measure the indiviual metal fluxes. In addition the metal sources can be reloaded in-situ for long times, The performance of these new components is discussed and results of first YBCO films grown on small samples are shown.