Variable-azimuth laser ablation:: principles and application for film deposition on long tubes and tapes

被引:9
作者
Usoskin, A [1 ]
García-Moreno, F
Freyhardt, HC
Knoke, J
Sievers, S
Gorkhover, L
Hofmann, A
Pink, F
机构
[1] Zentrum Funktionswerkstoffe GmbH, D-37073 Gottingen, Germany
[2] Univ Gottingen, Inst Mat Phys, D-37073 Gottingen, Germany
[3] Kabelmet Electro GmbH, D-30179 Hannover, Germany
[4] Pink Vakuum Technik GmbH, D-97877 Wertheim, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / Suppl 1期
关键词
D O I
10.1007/s003390051430
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new development of the pulsed laser ablation (PLA) technique based on variable azimuth ablation (VAA) is reported. The VAA itself is based on periodic variations of the azimuth of the laser beam relative to the target at a constant angle of beam incidence. Such variations result in a suppression of cone-valley surface structures which tend to develop in the case of a fixed azimuth. VAA leads to high-level stabilization of the laser plume during a long-term deposition process. As a result, the VAA method stabilizes the deposition rate with a tolerance of only 3%-6% instead of a 90% decrease in the rate as in conventional PLA. Different possibilities for the realization of the VAA technique based on 2- and 3-way target scans are discussed. In the case of large areas, VAA technique with a meander beam target scan is capable of the deposition of high-quality multicompositional superconducting films on tubes and tapes more than 1 m in length.
引用
收藏
页码:S423 / S425
页数:3
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