A mathematical framework for modeling the compositional depth profiles obtained by pulsed laser ablation

被引:31
作者
St-Onge, L [1 ]
机构
[1] Natl Res Council Canada, Inst Ind Mat, Boucherville, PQ J4B 6Y4, Canada
关键词
D O I
10.1039/b203024c
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper presents a simple mathematical model relevant to studies of depth-profile analysis utilizing pulsed laser ablation. The main model predictions (the amount of analyte ablated by a given laser shot, and the resulting crater profile) are independent of the method used to detect the analyte, so that the results are relevant to several techniques: laser-induced breakdown spectrometry (LIBS), laser-ablation inductively coupled plasma optical emission spectrometry or mass spectrometry (LA-ICP-OES or LA-ICP-MS) or laser-ablation time-of-flight mass spectrometry (LA-TOF-MS). The main focus of the model is on the influence of the laser beam radial energy distribution on the depth profiles. Accordingly, super-Gaussian (top-hat) as well as Gaussian laser beams can be modeled. Although the model can be used to simulate depth profiles in samples where the analyte concentration varies continuously as a function of depth, a particular emphasis of this paper is on multilayer samples. The notion of fluence threshold for ablation is also introduced, and the influence of crater aspect ratio is studied. The model is tested in relation to LIBS studies of galvannealed coatings on steel that use a Gaussian Nd: YAG laser beam at 1064 nm. The simulated depth profiles are found to correctly reproduce the shape of an experimental depth profile of the zinc signal, and the influence of specific model parameters is investigated.
引用
收藏
页码:1083 / 1089
页数:7
相关论文
共 16 条
[1]  
Benninghoven A., 1987, SECONDARY ION MASS S
[2]   PRELIMINARY-STUDY OF THE ROLE OF DISCHARGE CONDITIONS ON THE IN-DEPTH ANALYSIS OF CONDUCTING THIN-FILMS BY RADIOFREQUENCY GLOW-DISCHARGE OPTICAL-EMISSION SPECTROMETRY [J].
BORDELGARCIA, N ;
PEREIROGARCIA, R ;
FERNANDEZGARCIA, M ;
SANZMEDEL, A ;
HARVILLE, TR ;
MARCUS, RK .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1995, 10 (09) :671-676
[3]   Effects of crater development on fractionation and signal intensity during laser ablation inductively coupled plasma mass spectrometry [J].
Borisov, OV ;
Mao, XL ;
Russo, RE .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2000, 55 (11) :1693-1704
[4]   Capabilities of a homogenized 266 nm Nd:YAG laser ablation system for LA-ICP-MS [J].
Guillong, M ;
Horn, I ;
Günther, D .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2002, 17 (01) :8-14
[5]   Laser ablation and arc/spark solid sample introduction into inductively coupled plasma mass spectrometers [J].
Günther, D ;
Jackson, SE ;
Longerich, HP .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1999, 54 (3-4) :381-409
[6]   Design and performance of a refractive optical system that converts a Gaussian to a flattop beam [J].
Hoffnagle, JA ;
Jefferson, CM .
APPLIED OPTICS, 2000, 39 (30) :5488-5499
[7]   Depth profiling of thick layers of graded metal zirconia ceramic coatings using laser ablation inductively coupled plasma atomic emission spectrometry [J].
Kanicky, V ;
Novotny, I ;
Musil, J ;
Mermet, JM .
APPLIED SPECTROSCOPY, 1997, 51 (07) :1042-1046
[8]   Depth profiling of tin-coated glass by laser ablation inductively coupled plasma emission spectrometry with acoustic signal measurement [J].
Kanicky, V ;
Otruba, V ;
Mermet, JM .
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 2000, 366 (03) :228-233
[9]   A critical assessment of laser ablation ICP-MS as an analytical tool for depth analysis in silica-based glass samples [J].
Mank, AJG ;
Mason, PRD .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1999, 14 (08) :1143-1153
[10]   Depth profiling of multi-layer samples using femtosecond laser ablation [J].
Margetic, V ;
Bolshov, M ;
Stockhaus, A ;
Niemax, K ;
Hergenröder, R .
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2001, 16 (06) :616-621