Ozone sensor made by dip coating method

被引:11
作者
Hattori, A [1 ]
Tachibana, H [1 ]
Yoshiike, N [1 ]
Yoshida, A [1 ]
机构
[1] Matsushita Elect Ind Co Ltd, Human Environm Syst Dev Ctr, Moriguchi, Osaka 5708501, Japan
关键词
ozone sensors; ITO (Sn-doped indium oxide); intermittent exposure; air purifiers;
D O I
10.1016/S0924-4247(99)00077-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have developed an ozone sensor with an ITO (Sn-doped indium oxide) thin film made by dip-coating method. The film with 3 mol.% Sn at 360 degrees C showed excellent characteristics of ozone gas detection below 1 ppm. For intermittent exposure to ozone gas, the response time was shorter and the sensitivity gradually increased. It was clear that the ozone sensor needed annealing or aging to repress the change of the sensitivity. For an application of the ozone sensor, an air purifier with the ozone sensor after aging at 20 degrees C in 60% RH for 250 h showed a good control ability of the residual ozone concentration, a little influence of relative humidity and ambient gases. It is supposed that the sensor is useful for the air purifier to be practical. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:120 / 125
页数:6
相关论文
共 6 条
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