Ferroelectric thin films obtained by pulsed laser deposition

被引:24
作者
Purice, A.
Dinescu, G.
Scarisoreanu, N.
Verardi, P.
Craciun, R.
Galassi, C.
Dinescu, M.
机构
[1] Natl Inst Laser Plasma & Radiat Phys, Bucharest 077125, Romania
[2] CNR, Ist Acust, I-00133 Rome, Italy
[3] CNR, Ist Sistemi Compessi, Area Ric Tor Vergata, I-00133 Rome, Italy
[4] CNR, ISTEC, I-48018 Faenza, Italy
关键词
films; grain boundaries; PZT; PLZT; ferroelectric properties;
D O I
10.1016/j.jeurceramsoc.2006.02.027
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We review our significant results concerning pulsed laser deposition (PLD) of some ferroelectric compounds: (i) lead magnesium mobate Pb(Mg1/3Nb2/3)O-3 (PMN); (ii) lead magnesium niobate-lead titanate Pb(Mg1/3Nb2/3)O-3-PbTiO3 (PMN-PT), with variable PT contents; (iii) La-doped lead zirconate titanate (Pb1-xLax)(Zr0.65Ti0.33)O-3 (PLZT); and (iv) Nb-doped lead zirconate titanate Pb-0.988(Zr0.52Ti0.48)(0.976)Nb0.024O3 (PNZT). A parametric study has been performed in order to evidence the influence of the deposition parameters (laser wavelength, laser fluence, oxygen pressure, substrate type and temperature, RF power discharge addition, etc.) on the film properties and to identify the best growing conditions. Techniques including atomic force microscopy (AFM), X-ray diffraction (XRD), scanning electron microscopy (SEM), secondary ions mass spectroscopy (SIMS), transmission electron microscopy (TEM), electrical and ferroelectric hysteresis measurements have been used for layer characterization. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2937 / 2943
页数:7
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