Computational methods for design and control of MEMS micromanipulator arrays

被引：25

作者：

Bohringer, KF

Donald, BR

MacDonald, NC

Kovacs, GTA

Suh, JW

机构：

[1] CORNELL UNIV,ROBOT & VIS LAB,DEPT COMP SCI,ITHACA,NY 14853

[2] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

[3] STANFORD UNIV,DEPT ELECT ENGN,TRANSDUCERS LAB,STANFORD,CA 94305

来源：

IEEE COMPUTATIONAL SCIENCE & ENGINEERING | 1997年 / 4卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/99.590852

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

Arrays of MEMS devices can move and position tiny parts, such as integrated circuit chips, in flexible and predictable ways by oscillatory or ciliary action. The theory of programmable force fields can model this action, leading to algorithms for various types of micromanipulation that require no sensing of where the part is. Experiments support the theory.

引用

页码：17 / 29

页数：13

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